The Brooks InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm semi standard and Jeida standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square. To maximize the use of transport chamber facets for process modules, the InLinger mounts between the load lock and the transport chamber and allows access to the wafers in the lock.
Key Features
- Coordinates directly with the MagnaTran 7 robot to provide orientation and centering within the vacuum envelope
- Mounts in line with load lock to maximize facet availability for process modules
- Offers capability for transparent and/or square substrates
- Field proven
- CE/S2 compliant