These systems are perfect for a wide range of applications including MicroElectroMechanical systems (for MEMS inspection or MEMS measurement), semiconductor & discrete device inspection and measurement.These are multi-processor based automated inspection systems that support concurrent image analysis and stage motion.
- Complete, fully-contained, self-standing unit.
- Full gantry configuration (i.e. the camera moves over the parts; the parts themselves do not move).
- Available with high-speed 240 VAC servomotor motion system.
- Available in a wide range of travels, short and long.
- Available with application-specific camera / optics / illumination module.
- Available with a resolution as fine as 0.1 micron.
- Optional LASER module for laser profiling is also available.
- Easy to use, easy to program, fully automated inspection system.
- Inspection and measurement programs (i.e. "recipes") are easily created and modified using intuitive Graphical User Interface. Programs can be saved to disk and read-in later on.