Equipment | Atmospheric Robotics

Atmospheric Robotics

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Featured Equipment
KR 180-2 CR Atmospheric Robotics from KUKA Roboter GmbH.
A masterful mover with a fist-shaped work envelope, the KR 180-2 CR offers a space-saving and cost-effective standard solution for the cleanroom.
Other Equipment
ASYS Clean Room Robot VARIO A SINGLE 780 KH from ASYS Automatic Systems GmbH & Co. KG
The Vario A single 780 KH is the standard robot in a cost-optimized version for the atmosphere. Equipped with a single paddle and the arm reaching a distance of 780 mm and a vertical lift of 50 mm it is a very reliable, precise atmospheric robot. The VARIO series is the advancement of our standard robots which have been sold a thousand times to date.
GB4S Wafer Transport Robot from Genmark Automation, Inc.
The Gencobot 4S (GB4S) is a high precision wafer handling robot that offers superior performance at an affordable price. Identical in size to Genmark Automation's popular GB4 Robot, the GB4S features many design enhancements that result in improved robot performance and reliability. Engineered for single or dual wafer transport, the GB4S robot is available in various reach and vertical stroke combinations.
CHAD WaferMate300 Automated Wafer Handler from D-TEK TECHNOLOGY CO.,LTD
The CHAD WaferMate300 wafer handler delivers significant performance and cost savings for advanced semiconductor packaging. This system provides fully automated wafer handling for SMEMA compatible back-end process modules and supports 300 mm (12") wafers as well as 200mm wafers (8"). The CHAD WaferMate300 provides high-precision wafer handling and throughput at exceptional value. Application flexibility, high precision, and bulletproof reliability--together with plug-and-play ease of use ensure that the CHAD WaferMate300 will meet your most aggressive wafer handling needs.
TX40 CR Atmospheric Robotics from Stäubli
The cleanroom robots were designed from the initial concept to comply with the stringent requirements of the Cleanroom environment. Added advantages of superior throughput capabilities and industrial design reliability are provided.
ATM-100 Series Atmospheric Wafer Handling Robots from Fantron Technologies
Newly developed and fully backward compatible, the ATM-100, 300 & ATM-400 series atmospheric robots are a significant advancement in R-Theta-Z robot design and system architecture. Benefiting from the technological advances of today's components, the robots utilize lowinertia, quick response brushless servomotors. Coupled with zero-backlash Harmonic Drive® speed reducers, our robots offer greatly enhanced dexterity and precision.
300mm Dual Arm Multi Link™ Robot from Kensington Laboratories, LLC.
Kensington Laboratories 300mm dual arm atmospheric wafer handling robot meets the industry’s most rigorous 300mm performance standards. The MultiLink dual arm robot achieves extremely high throughput in a small footprint, providing a significant cost of ownership advantage.
IR-820 SCARA Robot from Innovative Robotics
The IR-820 robot employs a unique hardware and software approach, which provides performance enhancements and reduces the need for costly add-on options. The unique SCARA (Selective Compliance Articulated Robot Arm) operation of the IR-820 robot allows OEMs greater freedom to embed the robot within the process tool. This capability greatly improves tool productivity and in many cases can reduce the tool's footprint.
ROBOT RR407 Atmospheric Robotics from Rorze Technology, Inc.
This high performance atomospheric glass substrate transferring double arm robot is developed for FPD glass substrate transfer. The dual arm configuration decreases amount of time required to exchange substrates on a process stage.
Razor Atmospheric Transfer Robot from Brooks Automation, Inc.
Stay on the cutting edge with Brooks’ Razor atmospheric transfer robots. Razor robotics provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing. Leveraging Brooks’ kinematic mounting system, patented motional control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime.
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