Cleanroom and Semicon Robot Solutions from Stäubli

Stäubli cleanroom robots are particularly applicable in electronics and semiconductor industries to perform precisely controlled applications, like gentle and smooth handling of all media in semiconductor process.

Features and Benefits

  • ISO 14644-1 class 2/3 or FED209E subclass 1
  • Small footprint
  • High dexterity
  • Gloss, polyurethane surface
  • Totally enclosed arm

Loading and unloading  a carbon boat in photovoltaic industry.

The end effector design ensures a stress-free handling of the sensitive PV wafers.

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