Kensington Laboratories 300mm dual arm atmospheric wafer handling robot meets the industry’s most rigorous 300mm performance standards. The MultiLink dual arm robot achieves extremely high throughput in a small footprint, providing a significant cost of ownership advantage. Kensington Laboratories, a leader in advanced robotics technology, is committed to developing and manufacturing the highest quality and most cost effective atmospheric robots in the industry – all backed by Kensington Laboratories’ global service and support network.
High Throughput: Kensington’s proprietary vacuum counter-balancing system eliminates robot settling time in the Z axis. This, in combination with a rapid swap time of less than 3 seconds, significantly increases throughput. In four pod systems, greater than 360 wafers per hour throughput are achieved.
Low Co0: A minimal swept volume of less than 21 inches allows the dual arm robot to provide wafer handling operations within a very compact design, reducing overall system footprint
Accurate Wafer Placement: High performance design provides precise motion control and eliminates structural deflection and creep. All robot axes are guided by preloaded bearings mounted on monolithic frames machined from single ingots of highly stable aircraft-quality aluminum.
High Reliability: The MultiLink robot achieves exceptional MCBF of 10 million cycles by employing direct-drive DC servo motors with real-time force feedback and non-contacting glass scale encoders that monitor actual drive train output.
Automated Self Teach: The patented Automated Self Teach feature reduces time required to bring systems online and provides faster time to production ramp.
Zero Preventative Maintenance: Superior precision design requires no periodic lubrication or adjustments increasing system availability for production.