ReVera Acquires Ultra High Vacuum Wafer Handling Robot from Trust Automation

Trust Automation, Inc., known for standard and custom motion and motor control systems and solutions, today announced that they are providing Ultra High Vacuum (UHV) Robots to ReVera, a Nova Company. Trust Automation brings their dynamic and innovative engineering capabilities to support their customers' semiconductor programs that are continually demanding increased precision and faster throughput.

Ultra high vacuum robotic wafer handling equipment by Trust Automation, Inc.

Trust Automation's UHV Wafer Handling Robot was successfully and fully integrated with ReVera's tool, providing ReVera with the ability to meet their customers' production requirements.

Trust Automation's 8 axis UHV robot is:

  • Fully customizable
  • 300mm precision in-chamber wafer handling and positioning system configured for metrology processes
  • Capable of absolute X and Y precision to less than +/- 2.5 micrometers over the full wafer envelope and less than +/- 0.2 micrometers for the 50mm Z axis

"We applied our 25 years of experience to develop this robot for ReVera that will meet today's market demands for performance, reliability, and accuracy," said Dave Rennie, Vice President of Business Development at Trust Automation. "Our UHV robot is a solution to the semiconductor industry's balancing act of demanding the highest quality and throughput while keeping the cost low."

Trust Automation is an ISO 9001:2008 certified Women-Owned Small Business (WOSB) bringing high quality and reliability to the motion and motor control needs of multiple industries.

Additional information about Trust Automation's proven track record can be found at http://trustautomation.com.

Source: http://trustautomation.com

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