CHAD Industries declared that it will display automated wafer handling of electrostatic wafers carriers featuring automated SMIF pod delivery at SEMICON West 2012 in San Francisco.
CHAD will demonstrate the operation of the innovative WaferWare software of WaferMate300-2 wafer handling workcell, at the show. The workcell will be designed with 200 mm SMIF-EZ loadport as well as a 300 mm FOUP loadport. Based on proven handling techniques, the highly-flexible G-5 workcell is capable of automating standard as well as non-standard wafers for several designers and producers of OEM equipment.
The SMIF-EZ loadport will include the 200 mm electrostatic carrier wafers from CHAD's Technology partner Beam Services. Mounted with reduced-size wafer, the carriers will demonstrate the mounting efficiency of ‘challenging to handle- wafers’ onto an electrostatic carrier which is treated like a standard wafer during wafer processing and handling.
Furthermore, CHAD will demonstrate Adept Technology's autonomous indoor vehicle (AIV) for automated SMIF pod delivery. Being a secure autonomous indoor vehicle, the transporter delivers 150 mm, 200 mm, and reticle SMIF Pods within semiconductor fabs without the need for any additional infrastructure. The transporters move dexterously within narrow aisles and carries out operation within the human workspace ensuring seamless routine operations during installation and maintenance. The solution enhances production by moving SMIFs from one machine area to another with minimal handling and vibration. In addition, it decreases the number of particles resulting from human activity and enhances operational efficiency by reapplying costly labor from moving goods to higher-value tasks.
At the Semicon-West show, CHAD Industries will exhibit in the North Hall. The show is scheduled to take place from July 10 to 12 at the Moscone Center in San Francisco.